Author Affiliations
Abstract
1 Shanghai Institute of Laser Plasma, CAEP, Shanghai 201800, China
2 IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China
3 Institute of Applied Physics and Computational Mathematics, Beijing 100094, China
Although the streaked optical pyrometer (SOP) system has been widely adopted in shock temperature measurements, its reliability has always been of concern. Here, two calibrated Planckian radiators with different color temperatures were used to calibrate and verify the SOP system by comparing the two calibration standards using both multi-channel and single-channel methods. A high-color-temperature standard lamp and a multi-channel filter were specifically designed for the measurement system. To verify the reliability of the SOP system, the relative deviation between the measured data and the standard value of less than 5% was calibrated out, which demonstrates the reliability of the SOP system. Furthermore, a method to analyze the uncertainty and sensitivity of the SOP system is proposed. A series of laser-induced shock experiments were conducted at the ‘Shenguang-II’ laser facility to verify the reliability of the SOP system for temperature measurements at tens of thousands of kelvin. The measured temperature of the quartz in our experiments agreed fairly well with previous works, which serves as evidence for the reliability of the SOP system.
laser-induced shock waves shock temperature measurement streaked optical pyrometer High Power Laser Science and Engineering
2019, 7(3): 03000e49
同济大学 物理科学与工程学院 精密光学工程技术研究所,上海200092
针对“水窗”波段(280～540 eV)对多层膜反射镜的应用需求,在Sb的M5吸收边(525.5 eV)附近,选择Co和Sb作为该能点的多层膜材料组合,优化设计膜系结构。采用直流磁控溅射方法制备了Co/Sb多层膜,通过在溅射气体氩气中引入氮气作为反应气体,多层膜界面粗糙度明显减小。利用X射线掠入射反射(GIXRR)测试多层膜结构,并在北京BSRF同步辐射3W1B实验站测量了反应溅射前后的多层膜反射率(SXR),结果表明:氮气含量为25%时的界面粗糙度最小,反射率从无反应溅射的7.2%提高到11.7%。
反应溅射 多层膜 同步辐射 reactive sputtering multilayer synchrotron radiation Co/Sb Co/Sb
同济大学 物理科学与工程学院， 先进微结构材料教育部重点实验室， 上海 200092
为制备硼边附近6.7 nm波长的极紫外高反射率多层膜反射镜，研究了Mo2C/B4C，Mo/B4C周期多层膜,重点解决薄膜应力难题。采用直流磁控溅射技术制备了膜层厚度为30 nm的Mo,Mo2C,B4C单层膜,周期厚度为3.5 nm，30对的Mo2C/B4C,Mo/B4C周期多层膜。利用台阶仪测试了镀膜前后基底面形，计算并比较了不同薄膜样品的应力值。结果表明Mo2C/B4C多层膜压应力要远小于Mo/B4C多层膜，且成膜质量与Mo/B4C相当。因此Mo2C/B4C是应用于6.7 nm反射镜较好的多层膜材料组合。
应力 多层膜 磁控溅射 极紫外 stress multilayer magnetron sputtering extreme ultraviolet 强激光与粒子束
2014, 26(5): 054002
1 同济大学 物理系 精密光学工程技术研究所, 上海 200092
2 中国运载火箭研究院 试验物理与计算数学实验室, 北京 100076
采用磁控溅射方法在Si基板上镀制了横向梯度分布的Mo/Si周期多层膜。以X射线掠入射反射测量了横向梯度多层膜的膜系结构，在基板65 mm长度范围内，多层膜周期从8.21 nm线性减小到6.57 nm，周期梯度为0.03 nm/mm。国家同步辐射实验室反射率计的反射率测试结果表明：该横向梯度分布周期多层膜上不同位置，能反射在13.3~15.9 nm波段范围内不同波长的极紫外光，反射率为60%~65%。
Mo/Si多层膜 磁控溅射 梯度多层膜 反射率 同步辐射 Mo/Si multilayer magnetron sputtering laterally graded multilayer reflectivity synchrotron radiation
